Fingerprint
Dive into the research topics of 'Theoretical examination of MEMS microactuator responses with an emphasis on materials and fabrication'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Theoretical examination of MEMS microactuator responses with an emphasis on materials and fabrication
D. E. Glumac, T. G. Cooney, L. F. Francis, W. P. Robbins
Research output: Contribution to journal › Conference article › peer-review
3
Scopus
citations