Fingerprint
Dive into the research topics of 'Theoretical examination of MEMS microactuator responses with an emphasis on materials and fabrication'. Together they form a unique fingerprint.
Chemical Compounds
Microactuators
Lead zirconate titanate
MEMS
Fabrication
silicon nitride
Materials properties
Actuators
Polysilicon
Cantilever beams
Electric fields
Metals
Elastic moduli
Electrodes
Finite element method
Engineering & Materials Science
Microactuators
Lead zirconate titanate
MEMS
Fabrication
Materials properties
Actuators
Silicon nitride
Polysilicon
Cantilever beams
Electric fields
Elastic moduli
Electrodes
Metals
Finite element method
Physics & Astronomy
microelectromechanical systems
examination
fabrication
actuators
cantilever beams
piezoelectric ceramics
silicon nitrides
deflection
modulus of elasticity
electrodes
output
electric fields
coefficients
metals