Chemical Compounds
Cantilever Beam
100%
Piezoelectric Coefficient
97%
Nitride
60%
Electric Field
55%
Displacement
50%
Ceramic
47%
Force
42%
Behavior as Electrode
31%
Metal
27%
Engineering & Materials Science
Microactuators
86%
Lead zirconate titanate
75%
MEMS
57%
Fabrication
46%
Materials properties
26%
Actuators
23%
Silicon nitride
18%
Polysilicon
17%
Cantilever beams
17%
Electric fields
14%
Elastic moduli
13%
Electrodes
11%
Metals
9%
Finite element method
9%
Physics & Astronomy
microelectromechanical systems
60%
examination
52%
fabrication
37%
actuators
25%
cantilever beams
17%
piezoelectric ceramics
17%
silicon nitrides
15%
deflection
13%
modulus of elasticity
12%
electrodes
9%
output
9%
electric fields
9%
coefficients
8%
metals
7%