Fingerprint
Dive into the research topics of 'Thermal stress analyses of multilayered films on substrates and cantilever beams for micro sensors and actuators'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Thermal stress analyses of multilayered films on substrates and cantilever beams for micro sensors and actuators
C. H. Hsueh, C. R. Luttrell, Tianhong Cui
Research output: Contribution to journal › Article › peer-review
38
Scopus
citations