Thermally enhanced single-walled carbon nanotube microfluidic alignment

Zhijiang Ye, Dongjin Lee, Stephen A. Campbell, Tianhong Cui

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


We present thermally enhanced single-walled carbon nanotube (SWCNT) horizontal alignment on a wafer scale level that enhances the device performance with a possibility of mass production. The SWCNT dispersion is evaporated on the heated and tilted open microfluidic channel template of photoresist. Scanning electron microscopy demonstrates well-aligned SWCNTs qualitatively and G-band to D-band (G/D) ratio in Raman spectra indicates the degree of alignment quantitatively. The effect of temperature, fluidic channel dimension, concentration of SWCNT dispersion and wetting properties on the alignment is investigated, resulting in G/D ratio of up to 30.

Original languageEnglish (US)
Pages (from-to)2919-2923
Number of pages5
JournalMicroelectronic Engineering
Issue number9
StatePublished - Sep 2011

Bibliographical note

Funding Information:
We thank Professor Krishnan Mahesh at Department of Aerospace Engineering and Mechanics, University of Minnesota for very valuable discussion. This work was supported by the DARPA NEMS Program. We also acknowledge the Nanofabrication Center at the University of Minnesota, which is supported by NSF through NNIN. Part of this work was carried out at the Characterization Facility at the University of Minnesota.


  • Carbon nanotubes
  • Microfluidic channel
  • Nanotube alignment
  • Raman spectroscopy

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