An investigation of all-dielectric micromirrors was reported. A thermoelectrically controlled chip mount with a phase-measurement interference microscope was used to measure the thermal deformation of the micromirror. Thermally invariant coating design for all-dielectric micromirrors was also discussed. The observation showed that the deformation upon the temperature change was unchanged throughout the cycling process.
|Original language||English (US)|
|Number of pages||2|
|Journal||Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS|
|State||Published - Dec 1 2001|
|Event||14th Annual Meeting of the IEEE Lasers and Electro-Optics Society - San Diego, CA, United States|
Duration: Nov 11 2001 → Nov 15 2001