Thermochemistry and kinetics of silicon hydride cluster formation during thermal decomposition of silane

Physics & Astronomy

• thermochemistry 86%
• thermal decomposition 67%
• silanes 65%
• hydrides 61%
• kinetics 36%
• silicon 32%
• pyrolysis 13%
• reactivity 13%
• contamination 12%
• thermochemical properties 10%
• nucleation 10%
• estimates 7%
• dynamic models 7%
• surface reactions 6%
• atoms 6%
• aerosols 6%
• reaction kinetics 6%
• vapor deposition 5%
• simulation 5%
• products 4%

Chemical Compounds

• Silicon Hydride 94%
• Thermochemistry 71%
• Silane 57%
• Pyrolysis 42%
• Molecular Cluster 39%
• Silicon Atom 20%
• Additivity 20%
• Reaction Path 18%
• Nucleation 14%
• Simulation 10%
• Vapor Deposition Process 10%
• Surface Reaction 9%
• Chemical Vapour Deposition 7%
• Environment 4%

Engineering & Materials Science

• Thermochemistry 100%
• Silanes 77%
• Pyrolysis 57%
• Nucleation 14%
• Atoms 13%
• Contamination 13%
• Silicon 10%
• Surface reactions 9%
• Deposition rates 8%
• Aerosols 8%
• Chemical vapor deposition 7%
• Reaction kinetics 7%
• Dynamic models 5%