Abstract
An indentation size effect is a common occurrence during nanoindentation. Thin and thick gold films, deposited using sputter deposition and evaporation, illustrate this at depths less than 100 nm. The indentation size effect, however, has been observed to be independent of film thickness. It has been modeled using a combination of an indentation size effect model and a parabolic hardening model. At the near surface regime, the indentation size effect model is dominant, and at larger depths, the parabolic hardening model is dominant, taking into effect the film thickness. The described model, which is a combination of these two, fits the experimental data for the sputter-deposited films and the evaporated films.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2154-2159 |
| Number of pages | 6 |
| Journal | Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science |
| Volume | 38 A |
| Issue number | 13 |
| DOIs | |
| State | Published - Sep 2007 |
Bibliographical note
Funding Information:The authors gratefully acknowledge T.M. Davis, R.W. Liptak, V.D. Makarov, Y.C. Woo and B.J.H. Stadler of the University of Minnesota (EE 5657: Thin Film Techonology course) for the evaporated gold films. The research was supported by the United States Department of Energy through Contract No. DE-AC04-94AL85000 and the National Science Foundation under Grant Nos. DMI 0103169 and CMS-0322436.