Thin Aluminum Nitride Film Resonators: Miniaturized High Sensitivity Mass Sensors

Ronald P. O'Toole, Stanley G. Burns, Ronald P. O'Toole, Stanley G. Burns, Marc D. Porter, Glenn J. Bastiaans, Marc D. Porter, Glenn J. Bastiaans, Marc D. Porter, Marc D. Porter

Research output: Contribution to journal › Article › peer-review

53 Scopus citations

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Chemical Compounds