Abstract
The mechanics for plane strain geometry are presented for thin film fine lines by considering the case of microwedge indentation of a fine line subject to no residual stress. The analysis is separated into three parts depending on the absence or presence of buckling. During indentation, unbuckled or double-buckled configurations may exist, while single-buckling may occur when the indenter tip is removed. A microwedge tip was employed in the indentation testing of unstressed rf-sputtered tungsten fine lines to demonstrate some of the analysis.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 693-698 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 356 |
| State | Published - Jan 1 1995 |
| Event | Proceedings of the 1994 MRS Fall Meeting - Boston, MA, USA Duration: Nov 28 1994 → Dec 1 1994 |