An overview is presented of the development of thin-film-resonator (TFR)-based technology, including a discussion of materials, materials processing, and device physics. High-Q trapped energy resonators, low-insertion loss filters, and an integrated oscillator have been demonstrated and are reported. The future of TFR technology in the area of application-specific ICs as applied to communications, telemetry, sensors, and other high-frequency systems is examined.
|Original language||English (US)|
|Number of pages||11|
|Journal||Proceedings of the Annual IEEE International Frequency Control Symposium|
|State||Published - 1987|