Abstract
Thin films (1. 8 mu m thick) of ZnO have been deposited on tungsten carbide tool inserts by RF diode sputtering. The goal is to use the ZnO film as a sensor to monitor acoustic emission generated during cutting or tool fracture. The sensor has detected resonances in the machine structure in the 100-Hz to 20-kHz range as well as acoustic emission signals originating at the cutting site in the 100-500 kHz range. During forced tool fracture, distinctive signals were observed from the sensor which could be used for cutting operation shutdown. The measured ZnO stress sensitivity averaged about 0. 022 v-m/N which is about 35% of the single-crystal value. The highest observed was about 0. 04 v-m/N. The sensor was still operational at the end of the useful cutting lifetime of the insert.
| Original language | English (US) |
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| Pages (from-to) | 605-609 |
| Number of pages | 5 |
| Journal | Ultrasonics Symposium Proceedings |
| State | Published - Dec 1 1987 |