Abstract
A piezoelectric aluminum nitride film on oxidized silicon wafer is used to realize high frequency surface acoustic wave devices. Optical ring resonator is integrated with the surface acoustic wave device to demonstrate a high speed acousto-optic modulation.
| Original language | English (US) |
|---|---|
| Title of host publication | CLEO |
| Subtitle of host publication | Science and Innovations, CLEO_SI 2014 |
| Publisher | Optical Society of American (OSA) |
| ISBN (Print) | 9781557529992 |
| State | Published - Jan 1 2014 |
| Event | CLEO: Science and Innovations, CLEO_SI 2014 - San Jose, CA, United States Duration: Jun 8 2014 → Jun 13 2014 |
Other
| Other | CLEO: Science and Innovations, CLEO_SI 2014 |
|---|---|
| Country/Territory | United States |
| City | San Jose, CA |
| Period | 6/8/14 → 6/13/14 |