Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses

Todd A. Ballen; James R. Leger; Daniel E. Glumac; Lori S. Swanson; Edward Gage

doi:10.1364/OL.25.000515

Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses

Todd A. Ballen, James R. Leger, Daniel E. Glumac, Lori S. Swanson, Edward Gage

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Abstract

Mass-transport smoothing has been used to reduce the surface roughness of a gallium phosphide (GaP) microlens from 50.0 nm (rms) to 6.5 nm (rms) while preserving the original surface figure. The initial GaP surface was fabricated by dry-etch transfer of a polymer microlens into a GaP substrate. This result demonstrates that mass transport can significantly improve the performance of economically feasible high-refractive-index micro-optical elements having arbitrary surface profiles.

Original language	English (US)
Pages (from-to)	515-517
Number of pages	3
Journal	Optics Letters
Volume	25
Issue number	8
DOIs	https://doi.org/10.1364/OL.25.000515
State	Published - Apr 15 2000

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@article{ee48dd58ce9e425eab86b98d5dfb6992,

title = "Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses",

abstract = "Mass-transport smoothing has been used to reduce the surface roughness of a gallium phosphide (GaP) microlens from 50.0 nm (rms) to 6.5 nm (rms) while preserving the original surface figure. The initial GaP surface was fabricated by dry-etch transfer of a polymer microlens into a GaP substrate. This result demonstrates that mass transport can significantly improve the performance of economically feasible high-refractive-index micro-optical elements having arbitrary surface profiles.",

author = "Ballen, {Todd A.} and Leger, {James R.} and Glumac, {Daniel E.} and Swanson, {Lori S.} and Edward Gage",

year = "2000",

month = apr,

day = "15",

doi = "10.1364/OL.25.000515",

language = "English (US)",

volume = "25",

pages = "515--517",

journal = "Optics Letters",

issn = "0146-9592",

publisher = "The Optical Society",

number = "8",

}

TY - JOUR

T1 - Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses

AU - Ballen, Todd A.

AU - Leger, James R.

AU - Glumac, Daniel E.

AU - Swanson, Lori S.

AU - Gage, Edward

PY - 2000/4/15

Y1 - 2000/4/15

N2 - Mass-transport smoothing has been used to reduce the surface roughness of a gallium phosphide (GaP) microlens from 50.0 nm (rms) to 6.5 nm (rms) while preserving the original surface figure. The initial GaP surface was fabricated by dry-etch transfer of a polymer microlens into a GaP substrate. This result demonstrates that mass transport can significantly improve the performance of economically feasible high-refractive-index micro-optical elements having arbitrary surface profiles.

AB - Mass-transport smoothing has been used to reduce the surface roughness of a gallium phosphide (GaP) microlens from 50.0 nm (rms) to 6.5 nm (rms) while preserving the original surface figure. The initial GaP surface was fabricated by dry-etch transfer of a polymer microlens into a GaP substrate. This result demonstrates that mass transport can significantly improve the performance of economically feasible high-refractive-index micro-optical elements having arbitrary surface profiles.

UR - http://www.scopus.com/inward/record.url?scp=0043233171&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0043233171&partnerID=8YFLogxK

U2 - 10.1364/OL.25.000515

DO - 10.1364/OL.25.000515

M3 - Article

C2 - 18064096

AN - SCOPUS:0043233171

SN - 0146-9592

VL - 25

SP - 515

EP - 517

JO - Optics Letters

JF - Optics Letters

IS - 8

ER -

Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses

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