Using an optimized queueing network model to support wafer fab design

Wallace J. Hopp, Mark L. Spearman, Sergio Chayet, Karen L. Donohue, Esma S. Gel

Research output: Contribution to journalArticlepeer-review

58 Scopus citations

Abstract

We develop an Optimized Queueing Network (OQNet) capacity planning tool for supporting the design of new and reconfigured semiconductor fabrication facilities that makes use of queueing network approximations and an optimization routine. The basic problem addressed by this tool is to minimize the facility cost required to meet specified volume and cycle time targets. Features common to semiconductor environments, such as batch processes, re-entrant flows, multiple product classes, and machine setups, are incorporated into the model. Comparisons with simulation show that the queueing and other approximations are reasonably accurate. Tests of the optimization routine demonstrate that it can find good solutions quickly.

Original languageEnglish (US)
Pages (from-to)119-130
Number of pages12
JournalIIE Transactions (Institute of Industrial Engineers)
Volume34
Issue number2
DOIs
StatePublished - Feb 2002

Bibliographical note

Funding Information:
This work was supported in part by National Science Foundation Grant DMI-9322830 and a grant from Motorola, Inc.

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