In this paper, experimental measurements of the modulus for thin film PZT are presented. Several wafers with PZT patterned over Pt/Ti/SiO2 were fabricated. In each wafer, circular membranes of diameters ranging from 668 μm to 1667 μm were constructed using reactive ion etching. Film moduli for the various material layers were found by measuring membrane deflection under a concentrated load. Layer thickness was verified using SEM. To account for the initial curvature in the membrane, the relationship between load, deflection and stiffness was approximated by a spherical shell model. These stiffness values provided the basis for predicting micro cantilever beam vibration behavior.
|Original language||English (US)|
|Number of pages||5|
|Journal||Biennial University/Government/Industry Microelectronics Symposium - Proceedings|
|State||Published - 1999|
|Event||Proceedings of the 1999 13th Biennial University / Goverment / Industry Microelectronics Symposium (UGIM) - Minneapolis, MN, USA|
Duration: Jun 20 1999 → Jun 23 1999