A microwave plasma density measuring system with microsecond response time

Stanley G. Burns; James B. Beyer

doi:10.1063/1.1684271

A microwave plasma density measuring system with microsecond response time

Stanley G. Burns, James B. Beyer

Electrical Engineering

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Abstract

Based on the STALO (acronym for STAbilization of Local Oscillator) system wherein an external high Q cavity is used to frequency stabilize a reflex klystron, a technique was developed using a microwave Fabry-Perot resonator (MFPR) operating at 35 GHz for performing time varying plasma diagnostics over a two to three order of magnitude range centered at 5×10⁹ electrons/cm³. Experimental results are given for 2 MHz density variations in a 125 μ He rf induced discharge. The frequency response is an order of magnitude faster than an external feedback control system (also described) which utilizes the MFPR. Calibration techniques as well as the underlying theory are also given.

Original language	English (US)
Pages (from-to)	33-36
Number of pages	4
Journal	Review of Scientific Instruments
Volume	41
Issue number	1
DOIs	https://doi.org/10.1063/1.1684271
State	Published - 1970

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A microwave plasma density measuring system with microsecond response time

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