A plasma process for the synthesis of cubic-shaped silicon nanocrystals for nanoelectronic devices

Engineering & Materials Science

• Nanocrystals 100%
• Nanoelectronics 92%
• Plasmas 61%
• Silicon 52%
• Silanes 21%
• Nucleation 17%
• Nanoparticles 16%
• Plasma density 13%
• Density (specific gravity) 10%
• Orifices 9%
• Annealing 8%
• Contamination 8%
• Ions 7%
• Semiconductor materials 7%
• Transistors 7%
• Gases 4%

Physics & Astronomy

• nanocrystals 59%
• synthesis 48%
• silicon 35%
• silanes 18%
• low pressure 14%
• nucleation 12%
• nanoparticles 11%
• orifices 9%
• plasma density 8%
• contamination 7%
• vapor phases 6%
• transistors 6%
• reactors 6%
• probes 5%
• annealing 5%

Chemical Compounds

• Nanocrystal 54%
• Plasma 41%
• Silane 14%
• Nucleation 12%
• Silicon Nanoparticle 10%
• Pressure 8%
• Size Distribution 6%
• Cubic Space Group 6%
• Annealing 5%
• Semiconductor 5%
• Force 5%
• Shape 4%
• Probe 4%
• Gas 3%
• Nanoparticle 3%
• Ion 2%