Abstraction of hydrogen by SiH radicals from hydrogenated amorphous silicon surfaces

Engineering & Materials Science

• Amorphous silicon 100%
• Hydrogen 58%
• Plasma deposition 17%
• Energy barriers 16%
• Bond length 15%
• Exothermic reactions 14%
• Molecular dynamics 11%
• Activation energy 10%
• Atoms 10%
• Thermal energy 10%
• Defects 7%
• Gases 5%
• Computer simulation 5%

Chemical Compounds

• Amorphous Silicon 99%
• Hydrogen 37%
• Surface 23%
• Exothermic Reaction 12%
• Liquid Film 10%
• Energy Barrier 10%
• Energy 9%
• Hydrogen Atom 9%
• Bond Length 8%
• Dihedral Angle 8%
• Molecular Dynamics 7%
• Reaction Activation Energy 7%
• Simulation 6%
• Plasma 6%
• Gas 5%

Physics & Astronomy

• amorphous silicon 67%
• hydrogen 45%
• exothermic reactions 13%
• thermal energy 10%
• hydrogen atoms 9%
• vapor phases 8%
• activation energy 7%
• molecular dynamics 7%
• defects 5%
• configurations 5%
• simulation 3%
• energy 3%