Adiabatic embedment of nanomechanical resonators in photonic microring cavities

Chi Xiong, Wolfram Pernice, Mo Li, Michael Rooks, Hong X. Tang

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


We report a circuit cavity optomechanical system in which a nanomechanical resonator is adiabatically embedded inside an optical ring resonator with ultralow transition loss. The nanomechanical device forms part of the top layer of a horizontal silicon slot ring resonator, which enables dispersive coupling to the dielectric substrate via a tapered nanogap. Our measurements show nearly uncompromised optical quality factors (Q) after the release of mechanical beam.

Original languageEnglish (US)
Article number263101
JournalApplied Physics Letters
Issue number26
StatePublished - Jun 28 2010

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