An on-wafer probe array for measuring two-dimensional ion flux distributions in plasma reactors

Tae Won Kim; Saurabh J. Ullal; Vahid Vahedi; Eray S. Aydil

doi:10.1063/1.1502445

An on-wafer probe array for measuring two-dimensional ion flux distributions in plasma reactors

Tae Won Kim, Saurabh J. Ullal, Vahid Vahedi, Eray S. Aydil

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Original language	English (US)
Pages (from-to)	3494
Number of pages	1
Journal	Review of Scientific Instruments
Volume	73
Issue number	10
DOIs	https://doi.org/10.1063/1.1502445
State	Published - Oct 2002

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An on-wafer probe array for measuring two-dimensional ion flux distributions in plasma reactors

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