CaO buffer layer for the growth of ZnO thin film

Y. S. Lim; J. S. Jeong; J. Bang; J. Kim

doi:10.1016/j.ssc.2009.12.001

CaO buffer layer for the growth of ZnO thin film

Y. S. Lim, J. S. Jeong, J. Bang, J. Kim

Chemical Engineering and Materials Science

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12 Scopus citations

Abstract

We report the effect of CaO buffer layers on the structural properties of sputter-grown ZnO thin films. X-ray diffraction patterns indicated that enhanced crystallinity and alleviated compressive strain in the ZnO thin film were achieved by inserting a very thin CaO buffer layer between ZnO and the sapphire substrate. The interface was investigated by high-resolution transmission electron microscopy, and the result showed that the growth of CaO on the sapphire substrate follows the Stranski-Kristanov mode. The mechanism for the control of crystallinity and strain in the ZnO thin film was discussed, and was found to be strongly related to the growth mode of the CaO buffer layer.

Original language	English (US)
Pages (from-to)	428-430
Number of pages	3
Journal	Solid State Communications
Volume	150
Issue number	9-10
DOIs	https://doi.org/10.1016/j.ssc.2009.12.001
State	Published - Mar 2010

Bibliographical note

Funding Information:
This work was supported by a Grant-in-Aid for R&D Programs (No. 10029940) from the Korea Ministry of Knowledge Economy.

Keywords

A. ZnO
B. Sputtering
C. Transmission electron microscopy
D. Strain relaxation

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title = "CaO buffer layer for the growth of ZnO thin film",

abstract = "We report the effect of CaO buffer layers on the structural properties of sputter-grown ZnO thin films. X-ray diffraction patterns indicated that enhanced crystallinity and alleviated compressive strain in the ZnO thin film were achieved by inserting a very thin CaO buffer layer between ZnO and the sapphire substrate. The interface was investigated by high-resolution transmission electron microscopy, and the result showed that the growth of CaO on the sapphire substrate follows the Stranski-Kristanov mode. The mechanism for the control of crystallinity and strain in the ZnO thin film was discussed, and was found to be strongly related to the growth mode of the CaO buffer layer.",

keywords = "A. ZnO, B. Sputtering, C. Transmission electron microscopy, D. Strain relaxation",

author = "Lim, {Y. S.} and Jeong, {J. S.} and J. Bang and J. Kim",

note = "Funding Information: This work was supported by a Grant-in-Aid for R&D Programs (No. 10029940) from the Korea Ministry of Knowledge Economy. ",

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T1 - CaO buffer layer for the growth of ZnO thin film

AU - Lim, Y. S.

AU - Jeong, J. S.

AU - Bang, J.

AU - Kim, J.

N1 - Funding Information: This work was supported by a Grant-in-Aid for R&D Programs (No. 10029940) from the Korea Ministry of Knowledge Economy.

PY - 2010/3

Y1 - 2010/3

N2 - We report the effect of CaO buffer layers on the structural properties of sputter-grown ZnO thin films. X-ray diffraction patterns indicated that enhanced crystallinity and alleviated compressive strain in the ZnO thin film were achieved by inserting a very thin CaO buffer layer between ZnO and the sapphire substrate. The interface was investigated by high-resolution transmission electron microscopy, and the result showed that the growth of CaO on the sapphire substrate follows the Stranski-Kristanov mode. The mechanism for the control of crystallinity and strain in the ZnO thin film was discussed, and was found to be strongly related to the growth mode of the CaO buffer layer.

AB - We report the effect of CaO buffer layers on the structural properties of sputter-grown ZnO thin films. X-ray diffraction patterns indicated that enhanced crystallinity and alleviated compressive strain in the ZnO thin film were achieved by inserting a very thin CaO buffer layer between ZnO and the sapphire substrate. The interface was investigated by high-resolution transmission electron microscopy, and the result showed that the growth of CaO on the sapphire substrate follows the Stranski-Kristanov mode. The mechanism for the control of crystallinity and strain in the ZnO thin film was discussed, and was found to be strongly related to the growth mode of the CaO buffer layer.

KW - A. ZnO

KW - B. Sputtering

KW - C. Transmission electron microscopy

KW - D. Strain relaxation

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JO - Solid State Communications

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CaO buffer layer for the growth of ZnO thin film

Abstract

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Keywords

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