Deposition and modeling of hard, wear-resistant Si-C-N coatings

Engineering & Materials Science

• Plasmas 100%
• Nanocrystallites 99%
• Plasma torches 82%
• Coatings 81%
• Wear of materials 79%
• Substrates 76%
• Chemical analysis 70%
• Chemical vapor deposition 63%
• Gases 61%
• Argon 61%
• Reaction kinetics 60%
• Boundary layers 50%
• Nitrogen 50%
• Elastic moduli 45%
• Surface roughness 45%
• Hydrogen 43%
• Hardness 42%
• Hot Temperature 26%
• Temperature 21%

Physics & Astronomy

• coatings 73%
• torches 70%
• thermal plasmas 65%
• argon plasma 63%
• gases 55%
• reaction kinetics 49%
• boundary layers 47%
• roughness 44%
• modulus of elasticity 43%
• inclusions 42%
• hardness 42%
• vapor deposition 41%
• reactors 41%
• nitrogen 39%
• hydrogen 33%
• performance 23%
• temperature 16%

Chemical Compounds

• Thermal Plasma 77%
• Torch 75%
• Plasma Chemical Vapour Deposition 73%
• Hexamethyldisilazane 73%
• Vapor Deposition Process 65%
• Coating Agent 64%
• Gas 57%
• Liquid Film 52%
• Flow 35%
• Plasma 33%
• Nitrogen 32%
• Hydrogen 27%