The SuperCDMS collaboration is presently operating a 9 kg Ge payload at the Soudan Underground Laboratory in their direct search for dark matter. The Ge detectors utilize double-sided athermal phonon sensors with an interdigitated electrode structure (iZIPs) to reject near-surface electron-recoil events. These detectors each have a mass of 0.6 kg and were fabricated with photolithographic techniques. The detector fabrication advances required and the production yield encountered are described.
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Acknowledgments This work is supported in part by the Department of Energy and the National Science Foundation. These iZIP detectors were fabricated in the Stanford Nanofabrication Facility, a member of the National Nanotechnology Infrastructure Network.
- Cryogenic detectors
- Dark matter
- Transition edge sensors