Abstract
For surface wave produced argon plasmas in the 60-180 MHz range, electron energy distribution functions are calculated from the electron Boltzmann equation solved in the Lorentz approximation. Breakdown and maintenance field strengths are determined self-consistently by satisfying additional balance equations. The influence of space charge fields and the limits of the approximations used are discussed.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1571-1584 |
| Number of pages | 14 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 24 |
| Issue number | 9 |
| DOIs | |
| State | Published - 1991 |