Determination of electron energy distribution functions in surface wave produced plasmas. I. Modelling

U. Kortshagen, H. Schlueter, A. Shivarova

Research output: Contribution to journalArticlepeer-review

38 Scopus citations

Abstract

For surface wave produced argon plasmas in the 60-180 MHz range, electron energy distribution functions are calculated from the electron Boltzmann equation solved in the Lorentz approximation. Breakdown and maintenance field strengths are determined self-consistently by satisfying additional balance equations. The influence of space charge fields and the limits of the approximations used are discussed.

Original languageEnglish (US)
Pages (from-to)1571-1584
Number of pages14
JournalJournal of Physics D: Applied Physics
Volume24
Issue number9
DOIs
StatePublished - Jan 1 1991

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