Abstract
The knock-on type damage with ejection of nitrogen atoms from a sample that was observed in wurtzite InN during irradiation by 100 keV electron beam was discussed. The wurtzite InN was grown by conventional molecular beam epitaxy on a sapphire substrate. Results were used to predict the damage that can occur in InN specimens of varying thicknesses.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 859-861 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 82 |
| Issue number | 6 |
| DOIs | |
| State | Published - Feb 10 2003 |