Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma

U. Kortshagen; B. Heil

doi:10.1063/1.1289905

Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma

U. Kortshagen, B. Heil

Mechanical Engineering

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3 Scopus citations

Abstract

Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a "convection cell" in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons.

Original language	English (US)
Pages (from-to)	1265-1267
Number of pages	3
Journal	Applied Physics Letters
Volume	77
Issue number	9
DOIs	https://doi.org/10.1063/1.1289905
State	Published - Aug 28 2000

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abstract = "Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a {"}convection cell{"} in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons.",

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Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma

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