Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma

U. Kortshagen, B. Heil

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a "convection cell" in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons.

Original languageEnglish (US)
Pages (from-to)1265-1267
Number of pages3
JournalApplied Physics Letters
Volume77
Issue number9
DOIs
StatePublished - Aug 28 2000

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