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Fabrication and characterization of metal-oxide-semiconductor capacitor based on layer-by-layer self-assembled thin films
F. Hua, J. Shi, Y. Lvov,
T. Cui
Mechanical Engineering
Research output
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Contribution to journal
›
Article
›
peer-review
36
Scopus citations
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Engineering & Materials Science
Oxide semiconductors
100%
Thin films
79%
Capacitors
66%
Fabrication
62%
Metals
54%
Quartz crystal microbalances
26%
Self assembly
22%
Silicon wafers
20%
Semiconductor devices
19%
CCD cameras
19%
Microscopes
16%
Industrial applications
15%
Surface roughness
13%
Silicon
13%
Substrates
11%
Temperature
6%
Costs
6%
Chemical Compounds
Capacitor
86%
Dimension
25%
Surface Roughness
16%
Quartz
14%
White
14%
Semiconductor
12%
Time
6%
Application
5%