High mobility channels for ultimate CMOS

D. K. Sadana, S. J. Koester, Y. Sun, E. W. Kiewra, S. W. Bedell, A. Reznicek, J. A. Ott, K. Fogel, D. J. Webb, J. Fompeyrine, J. P. Locquet, M. Sousa, R. Germann

Research output: Contribution to journal › Conference article › peer-review

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Engineering & Materials Science