In situ epitaxial growth of ordered FePt (001) films with ultra small and uniform grain size using a RuAl underlayer

W. K. Shen; J. H. Judy; Jian Ping Wang

doi:10.1063/1.1847312

In situ epitaxial growth of ordered FePt (001) films with ultra small and uniform grain size using a RuAl underlayer

W. K. Shen, J. H. Judy, Jian Ping Wang

Electrical and Computer Engineering

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29 Scopus citations

Abstract

In situ epitaxial growth of ordered FePt thin films with small and uniform grain size using RuAl underlayer is reported. A transmission electron microscopy image of a 20-nm RuAl layer deposited on a glass substrate revealed small (D~5.0 nm) and uniform (ΔDD~15%) grains. The (001) texture was formed in RuAl films at a substrate temperature higher than 100°C. The FePt L10 (001) texture with mean grain size of 6.63 nm and narrow size distribution (17%) has been successfully induced using a RuAl underlayer at a substrate temperature of 400°C. The influences of the RuAl composition ratio and Pt interlayer were studied.

Original language	English (US)
Article number	10H301
Journal	Journal of Applied Physics
Volume	97
Issue number	10
DOIs	https://doi.org/10.1063/1.1847312
State	Published - May 15 2005

Bibliographical note

Funding Information:
The support from INSIC EHDR program and Heraeus Inc. is gratefully acknowledged.

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Copyright 2012 Elsevier B.V., All rights reserved.

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@article{c21e5253196e443194e999c0956c8ec1,

title = "In situ epitaxial growth of ordered FePt (001) films with ultra small and uniform grain size using a RuAl underlayer",

abstract = "In situ epitaxial growth of ordered FePt thin films with small and uniform grain size using RuAl underlayer is reported. A transmission electron microscopy image of a 20-nm RuAl layer deposited on a glass substrate revealed small (D~5.0 nm) and uniform (ΔDD~15%) grains. The (001) texture was formed in RuAl films at a substrate temperature higher than 100°C. The FePt L10 (001) texture with mean grain size of 6.63 nm and narrow size distribution (17%) has been successfully induced using a RuAl underlayer at a substrate temperature of 400°C. The influences of the RuAl composition ratio and Pt interlayer were studied.",

author = "Shen, {W. K.} and Judy, {J. H.} and Wang, {Jian Ping}",

year = "2005",

month = may,

day = "15",

doi = "10.1063/1.1847312",

language = "English (US)",

volume = "97",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "10",

}

TY - JOUR

T1 - In situ epitaxial growth of ordered FePt (001) films with ultra small and uniform grain size using a RuAl underlayer

AU - Shen, W. K.

AU - Judy, J. H.

AU - Wang, Jian Ping

PY - 2005/5/15

Y1 - 2005/5/15

N2 - In situ epitaxial growth of ordered FePt thin films with small and uniform grain size using RuAl underlayer is reported. A transmission electron microscopy image of a 20-nm RuAl layer deposited on a glass substrate revealed small (D~5.0 nm) and uniform (ΔDD~15%) grains. The (001) texture was formed in RuAl films at a substrate temperature higher than 100°C. The FePt L10 (001) texture with mean grain size of 6.63 nm and narrow size distribution (17%) has been successfully induced using a RuAl underlayer at a substrate temperature of 400°C. The influences of the RuAl composition ratio and Pt interlayer were studied.

AB - In situ epitaxial growth of ordered FePt thin films with small and uniform grain size using RuAl underlayer is reported. A transmission electron microscopy image of a 20-nm RuAl layer deposited on a glass substrate revealed small (D~5.0 nm) and uniform (ΔDD~15%) grains. The (001) texture was formed in RuAl films at a substrate temperature higher than 100°C. The FePt L10 (001) texture with mean grain size of 6.63 nm and narrow size distribution (17%) has been successfully induced using a RuAl underlayer at a substrate temperature of 400°C. The influences of the RuAl composition ratio and Pt interlayer were studied.

UR - http://www.scopus.com/inward/record.url?scp=21044432095&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=21044432095&partnerID=8YFLogxK

U2 - 10.1063/1.1847312

DO - 10.1063/1.1847312

M3 - Article

AN - SCOPUS:21044432095

SN - 0021-8979

VL - 97

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 10

M1 - 10H301

ER -

In situ epitaxial growth of ordered FePt (001) films with ultra small and uniform grain size using a RuAl underlayer

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