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Interactions between plasma and block copolymers used in directed self-assembly patterning
Stephen Sirard, Laurent Azarnouche, Emir Gurer, William Durand, Michael Maher, Kazunori Mori, Gregory Blachut, Dustin Janes, Yusuke Asano, Yasunobu Someya, Diane Hymes, David Graves, Christopher J. Ellison, C. Grant Willson
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
10
Scopus
citations