Modeling gas-phase nucleation in inductively coupled silane-oxygen plasmas

Engineering & Materials Science

• Inductively coupled plasma 100%
• Silicon oxides 96%
• Silanes 85%
• Argon 75%
• Nucleation 70%
• Conservation 64%
• Plasmas 61%
• Momentum 61%
• Oxygen 54%
• Gases 38%
• Temperature 26%

Physics & Astronomy

• oxygen plasma 78%
• conservation equations 78%
• argon plasma 78%
• silanes 72%
• silicon oxides 70%
• low pressure 56%
• vapor phases 53%
• reactors 50%
• nucleation 50%
• momentum 46%
• temperature 19%
• energy 19%

Chemical Compounds

• Momentum 88%
• Silicon Oxide 82%
• Inductively Coupled Plasma 66%
• Multicomponent Reaction 58%
• Nucleation 55%
• Plasma 41%
• Energy 31%