Abstract
Growth, charging, and transport of nanoparticles in a low-pressure RF plasma are studied by using a 1-D time-dependent numerical model. Images are presented, which show the spatiotemporal evolution of the nanoparticle size distribution function.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1022-1023 |
| Number of pages | 2 |
| Journal | IEEE Transactions on Plasma Science |
| Volume | 36 |
| Issue number | 4 PART 1 |
| DOIs | |
| State | Published - Aug 2008 |
Keywords
- Coagulation
- Drag
- Electrodes
- Evolution (biology)
- Low-pressure plasma
- Nanoparticle growth
- Nanoparticles
- Numerical models
- Numerical simulation
- Plasmas
- Radio frequency