Numerical study of the effect of gas temperature on the time for onset of particle nucleation in argon-silane low-pressure plasmas

Upendra Bhandarkar, Uwe Kortshagen, Steven L. Girshick

Research output: Contribution to journalArticlepeer-review

66 Scopus citations

Fingerprint

Dive into the research topics of 'Numerical study of the effect of gas temperature on the time for onset of particle nucleation in argon-silane low-pressure plasmas'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds