Particle in cell Monte Carlo collisions modeling of inductively coupled plasmas

V. A. Schweigert, U. R. Kortshagen

Research output: Contribution to journalArticlepeer-review

Abstract

A two-dimensional, axially symmetric, inductive discharge over a wide range of argon pressure and plasma density is described. The Maxwell equations for the different harmonics in the vector potential are solved using finite difference. The kinetic equations for both electrons and ions are solved using Monte Carlo approach.

Original languageEnglish (US)
Pages (from-to)165
Number of pages1
JournalIEEE International Conference on Plasma Science
DOIs
StatePublished - 2000

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