Particle in cell Monte Carlo collisions modeling of inductively coupled plasmas

V. A. Schweigert; U. R. Kortshagen

doi:10.1109/PLASMA.2000.854866

Particle in cell Monte Carlo collisions modeling of inductively coupled plasmas

V. A. Schweigert, U. R. Kortshagen

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A two-dimensional, axially symmetric, inductive discharge over a wide range of argon pressure and plasma density is described. The Maxwell equations for the different harmonics in the vector potential are solved using finite difference. The kinetic equations for both electrons and ions are solved using Monte Carlo approach.

Original language	English (US)
Pages (from-to)	165
Number of pages	1
Journal	IEEE International Conference on Plasma Science
DOIs	https://doi.org/10.1109/PLASMA.2000.854866
State	Published - 2000

Access

10.1109/PLASMA.2000.854866

OpenUrl availability

Full text

Cite this

@article{4bad08428d7a43899d19a8e6ec89fce6,

title = "Particle in cell Monte Carlo collisions modeling of inductively coupled plasmas",

abstract = "A two-dimensional, axially symmetric, inductive discharge over a wide range of argon pressure and plasma density is described. The Maxwell equations for the different harmonics in the vector potential are solved using finite difference. The kinetic equations for both electrons and ions are solved using Monte Carlo approach.",

author = "Schweigert, {V. A.} and Kortshagen, {U. R.}",

year = "2000",

doi = "10.1109/PLASMA.2000.854866",

language = "English (US)",

pages = "165",

journal = "IEEE International Conference on Plasma Science",

issn = "0730-9244",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - Particle in cell Monte Carlo collisions modeling of inductively coupled plasmas

AU - Schweigert, V. A.

AU - Kortshagen, U. R.

PY - 2000

Y1 - 2000

N2 - A two-dimensional, axially symmetric, inductive discharge over a wide range of argon pressure and plasma density is described. The Maxwell equations for the different harmonics in the vector potential are solved using finite difference. The kinetic equations for both electrons and ions are solved using Monte Carlo approach.

AB - A two-dimensional, axially symmetric, inductive discharge over a wide range of argon pressure and plasma density is described. The Maxwell equations for the different harmonics in the vector potential are solved using finite difference. The kinetic equations for both electrons and ions are solved using Monte Carlo approach.

UR - http://www.scopus.com/inward/record.url?scp=0033722823&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033722823&partnerID=8YFLogxK

U2 - 10.1109/PLASMA.2000.854866

DO - 10.1109/PLASMA.2000.854866

M3 - Article

AN - SCOPUS:0033722823

SN - 0730-9244

SP - 165

JO - IEEE International Conference on Plasma Science

JF - IEEE International Conference on Plasma Science

ER -

Particle in cell Monte Carlo collisions modeling of inductively coupled plasmas

Abstract

Access

OpenUrl availability

Other files and links

Fingerprint

Cite this