TY - JOUR
T1 - Plasma synthesis of single-crystal silicon nanoparticles for novel electronic device applications
AU - Bapat, Ameya
AU - Anderson, Curtis
AU - Perrey, Christopher R.
AU - Carter, C. Barry
AU - Campbell, Stephen A.
AU - Kortshagen, Uwe
PY - 2004/12
Y1 - 2004/12
N2 - Single-crystal nanoparticles of silicon, several tens of nanometres in diameter, may be suitable as building blocks for single-nanoparticle electronic devices. Previous studies of nanoparticles produced in low-pressure plasmas have demonstrated the synthesis of nanocrystals 2-10 nm diameter but larger particles were amorphous or polycrystalline. This work reports the use of a constricted, filamentary capacitively coupled low-pressure plasma to produce single-crystal silicon nanoparticles with diameters between 20 and 80 nm. Particles are highly oriented with predominantly cubic shape. The particle size distribution is rather monodisperse. Electron microscopy studies confirm that the nanoparticles are highly oriented diamond-cubic silicon.
AB - Single-crystal nanoparticles of silicon, several tens of nanometres in diameter, may be suitable as building blocks for single-nanoparticle electronic devices. Previous studies of nanoparticles produced in low-pressure plasmas have demonstrated the synthesis of nanocrystals 2-10 nm diameter but larger particles were amorphous or polycrystalline. This work reports the use of a constricted, filamentary capacitively coupled low-pressure plasma to produce single-crystal silicon nanoparticles with diameters between 20 and 80 nm. Particles are highly oriented with predominantly cubic shape. The particle size distribution is rather monodisperse. Electron microscopy studies confirm that the nanoparticles are highly oriented diamond-cubic silicon.
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U2 - 10.1088/0741-3335/46/12B/009
DO - 10.1088/0741-3335/46/12B/009
M3 - Article
AN - SCOPUS:12744259824
SN - 0741-3335
VL - 46
SP - B97-B109
JO - Plasma Physics and Controlled Fusion
JF - Plasma Physics and Controlled Fusion
IS - 12 B
ER -