@inproceedings{7466477b9fc64124992f044e16273db6,
title = "Simulation of flows and contaminant transport in liquid tanks",
abstract = "Liquid processing continues to be important in the microelectronics industry. Liquid tanks are used for chemical processing and for cleaning parts. Various tank designs are used but there is very little knowledge of the flow patterns and transport of contaminants in these tanks. This paper reports the development of a simulation technique that can be used to predict the flow due to combined pumping, natural convection and acoustic streaming. The transport of both chemicals and particulate contaminants is included.",
author = "Y. Wu and Kuehn, {T. H.} and Liu, {B. Y.H.}",
note = "Copyright: Copyright 2004 Elsevier B.V., All rights reserved.; Proceedings of the 39th Annual Technical Meeting of Institute of Environmental Sciences ; Conference date: 02-05-1993 Through 07-05-1993",
year = "1993",
language = "English (US)",
isbn = "1877862193",
series = "Proceedings, Annual Technical Meeting - Institute of Environmental Sciences",
publisher = "Publ by Inst of Environmental Sciences",
pages = "396--406",
editor = "Anon",
booktitle = "Proceedings, Annual Technical Meeting - Institute of Environmental Sciences",
}