Structural and electrical characterization of PZT on gold for micromachined piezoelectric membranes

M. C. Robinson, D. J. Morris, P. D. Hayenga, J. H. Cho, C. D. Richards, R. F. Richards, D. F. Bahr

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

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Engineering & Materials Science

Chemical Compounds