Sub-Micrometer Zeolite Films on Gold-Coated Silicon Wafers with Single-Crystal-Like Dielectric Constant and Elastic Modulus

Raffaele Tiriolo; Neel Rangnekar; Han Zhang; Meera Shete; Peng Bai; John Nelson; Evguenia Karapetrova; Christopher W. Macosko; Joern Ilja Siepmann; Ernesto Lamanna; Angelo Lavano; Michael Tsapatsis

doi:10.1002/adfm.201700864

Sub-Micrometer Zeolite Films on Gold-Coated Silicon Wafers with Single-Crystal-Like Dielectric Constant and Elastic Modulus

Raffaele Tiriolo, Neel Rangnekar, Han Zhang, Meera Shete, Peng Bai, John Nelson, Evguenia Karapetrova, Christopher W. Macosko, Joern Ilja Siepmann, Ernesto Lamanna, Angelo Lavano, Michael Tsapatsis

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Abstract

A low-temperature synthesis coupled with mild activation produces zeolite films exhibiting low dielectric constant (low-k) matching the theoretically predicted and experimentally measured values for single crystals. This synthesis and activation method allows for the fabrication of a device consisting of a b-oriented film of the pure-silica zeolite MFI (silicalite-1) supported on a gold-coated silicon wafer. The zeolite seeds are assembled by a manual assembly process and subjected to optimized secondary growth conditions that do not cause corrosion of the gold underlayer, while strongly promoting in-plane growth. The traditional calcination process is replaced with a nonthermal photochemical activation to ensure preservation of an intact gold layer. The dielectric constant (k), obtained through measurement of electrical capacitance in a metal–insulator–metal configuration, highlights the ultralow k ≈ 1.7 of the synthetized films, which is among the lowest values reported for an MFI film. There is large improvement in elastic modulus of the film (E ≈ 54 GPa) over previous reports, potentially allowing for integration into silicon wafer processing technology.

Original language	English (US)
Article number	1700864
Journal	Advanced Functional Materials
Volume	27
Issue number	25
DOIs	https://doi.org/10.1002/adfm.201700864
State	Published - Jul 5 2017

Bibliographical note

Funding Information:
R.T. and N.R. contributed equally to this work. The authors acknowledge support through the Center for Gas Separations Relevant to Clean Energy Technologies, an Energy Frontier Research Center funded by the US Department of Energy, Office of Science, Basic Energy Sciences under Award No. DE-SC0001015. Parts of this work were carried out in the Characterization Facility and the Minnesota Nano Center, University of Minnesota, which received partial support from NSF through the MRSEC program. Use of the Advanced Photon Source sector 33BM was supported by the US Department of Energy, Office of Science, Office of Basic Energy Sciences under Contract No. DE-AC02-06CH11357. The computational work was supported by the US Department of Energy, Office of Basic Energy Sciences, Division of Chemical Sciences, Geosciences and Biosciences under Award No. DEFG02-12ER16362. R.T. acknowledges financial support from the University of Magna Graecia. N.R. acknowledges financial support through the Doctoral Dissertation Fellowship granted by the University of Minnesota.

Publisher Copyright:
© 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Keywords

Dielectrics
Low-k materials
Synchrotron X-ray diffraction
UV treatment
Zeolites

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Reporting period for MRSEC

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10.1002/adfm.201700864

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Tiriolo, R., Rangnekar, N., Zhang, H., Shete, M., Bai, P., Nelson, J., Karapetrova, E., Macosko, C. W., Siepmann, J. I., Lamanna, E., Lavano, A., & Tsapatsis, M. (2017). Sub-Micrometer Zeolite Films on Gold-Coated Silicon Wafers with Single-Crystal-Like Dielectric Constant and Elastic Modulus. Advanced Functional Materials, 27(25), Article 1700864. https://doi.org/10.1002/adfm.201700864

Tiriolo, R, Rangnekar, N, Zhang, H, Shete, M, Bai, P, Nelson, J, Karapetrova, E, Macosko, CW, Siepmann, JI, Lamanna, E, Lavano, A & Tsapatsis, M 2017, 'Sub-Micrometer Zeolite Films on Gold-Coated Silicon Wafers with Single-Crystal-Like Dielectric Constant and Elastic Modulus', Advanced Functional Materials, vol. 27, no. 25, 1700864. https://doi.org/10.1002/adfm.201700864

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Sub-Micrometer Zeolite Films on Gold-Coated Silicon Wafers with Single-Crystal-Like Dielectric Constant and Elastic Modulus

Abstract

Bibliographical note

Keywords

How much support was provided by MRSEC?

Reporting period for MRSEC

Access

OpenUrl availability

Other files and links

Fingerprint

MRSEC IRG-3: Hierarchical Multifunctional Macromolecular Materials

University of Minnesota MRSEC (DMR-1420013)

NMGC: Nanoporous Materials Genome: Methods and Software to Optimize Gas Storage, Separations, and Catalysis (Phase 1)

Cite this

Sub-Micrometer Zeolite Films on Gold-Coated Silicon Wafers with Single-Crystal-Like Dielectric Constant and Elastic Modulus

Abstract

Bibliographical note

Keywords

How much support was provided by MRSEC?

Reporting period for MRSEC

Access

OpenUrl availability

Other files and links

Fingerprint

Projects

MRSEC IRG-3: Hierarchical Multifunctional Macromolecular Materials

University of Minnesota MRSEC (DMR-1420013)

NMGC: Nanoporous Materials Genome: Methods and Software to Optimize Gas Storage, Separations, and Catalysis (Phase 1)

Cite this