Synthesis and deposition of nanoparticles using a hypersonically expanded plasma

Jami Hafiz, Xiaoliang Wang, Rajesh Mukherjee, Peter H McMurry, Joachim V.R. Heberlein, Steven L Girshick

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Si-Ti-N nanostructured coatings were synthesized by inertial impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). Transmission electron microscopy on samples prepared by focused ion beam (FIB) milling show TiN nanocrystallites in an amorphous matrix. X-ray photoelectron spectroscopy results indicate the presence of amorphous Si 3N4 in similar films. In-situ particle size distribution measurements show that particle size distributions peak around 14 nm under typical operating conditions.

Original languageEnglish (US)
Title of host publicationNEW VISTAS IN DUSTY PLASMAS
Subtitle of host publicationFourth International Conference on the Physics of Dusty Plasmas
Pages514-517
Number of pages4
DOIs
StatePublished - Oct 31 2005
Event4th International Conference on the Physics of Dusty Plasmas - Orleans, France
Duration: Jun 13 2005Jun 17 2005

Publication series

NameAIP Conference Proceedings
Volume799
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other4th International Conference on the Physics of Dusty Plasmas
CountryFrance
CityOrleans
Period6/13/056/17/05

Keywords

  • Aerodynamic lenses
  • Nanoparticle impaction
  • Nanostructured coatings

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