Tents and tunnels on martensitic films

K. Bhattacharya; A. Desimone; K. F. Hane; R. D. James; C. J. Palmstrøm

doi:10.1016/s0921-5093(99)00397-4

Tents and tunnels on martensitic films

K. Bhattacharya, A. Desimone, K. F. Hane, R. D. James, C. J. Palmstrøm

Research output: Contribution to journal › Article › peer-review

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Abstract

In this paper we outline a strategy for producing certain deformable structures - tents and tunnels - on epitaxially grown martensitic single crystal films. These structures are intended to be the basic building blocks of micropumps and microactuators. We give specific predictions for the systems Ni₂MnGa, PbTiO₃ and Cu-Zn-Al.

Original language	English (US)
Pages (from-to)	685-689
Number of pages	5
Journal	Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing
Volume	273-275
DOIs	https://doi.org/10.1016/s0921-5093(99)00397-4
State	Published - Dec 15 1999

Bibliographical note

Funding Information:
We thank A.H. Bensaoula and J. Dong for their assistance with epitaxial growth experiments. This work was partially supported by AFOSR/MURI F49620-98-1-0433 (K. Bhattacharya, K.F. Hane, R.D. James, C.J. Palmstrøm), ARO DA/DAAG55-98-1-0335 (R.D. James, K.F. Hane), NSF CMS-9457573 (K. Bhattacharya), NSF DMS-9505077 (R.D. James, K.F. Hane) and ONR/DARPA N00014-95-1-1145 and -91-J-4034 (R.D. James).

Keywords

Ferroelectrics
Ferromagnetic shape-memory alloys
MEMS
Micropumps
Shape-memory alloys
Thin-films

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abstract = "In this paper we outline a strategy for producing certain deformable structures - tents and tunnels - on epitaxially grown martensitic single crystal films. These structures are intended to be the basic building blocks of micropumps and microactuators. We give specific predictions for the systems Ni2MnGa, PbTiO3 and Cu-Zn-Al.",

keywords = "Ferroelectrics, Ferromagnetic shape-memory alloys, MEMS, Micropumps, Shape-memory alloys, Thin-films",

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AU - Bhattacharya, K.

AU - Desimone, A.

AU - Hane, K. F.

AU - James, R. D.

AU - Palmstrøm, C. J.

N1 - Funding Information: We thank A.H. Bensaoula and J. Dong for their assistance with epitaxial growth experiments. This work was partially supported by AFOSR/MURI F49620-98-1-0433 (K. Bhattacharya, K.F. Hane, R.D. James, C.J. Palmstrøm), ARO DA/DAAG55-98-1-0335 (R.D. James, K.F. Hane), NSF CMS-9457573 (K. Bhattacharya), NSF DMS-9505077 (R.D. James, K.F. Hane) and ONR/DARPA N00014-95-1-1145 and -91-J-4034 (R.D. James).

PY - 1999/12/15

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KW - Ferroelectrics

KW - Ferromagnetic shape-memory alloys

KW - MEMS

KW - Micropumps

KW - Shape-memory alloys

KW - Thin-films

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Tents and tunnels on martensitic films

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Bibliographical note

Keywords

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