Tents and tunnels on martensitic films

K. Bhattacharya, A. Desimone, K. F. Hane, R. D. James, C. J. Palmstrøm

Research output: Contribution to journalArticlepeer-review

45 Scopus citations

Abstract

In this paper we outline a strategy for producing certain deformable structures - tents and tunnels - on epitaxially grown martensitic single crystal films. These structures are intended to be the basic building blocks of micropumps and microactuators. We give specific predictions for the systems Ni2MnGa, PbTiO3 and Cu-Zn-Al.

Original languageEnglish (US)
Pages (from-to)685-689
Number of pages5
JournalMaterials Science and Engineering A
Volume273-275
DOIs
StatePublished - Dec 15 1999

Keywords

  • Ferroelectrics
  • Ferromagnetic shape-memory alloys
  • MEMS
  • Micropumps
  • Shape-memory alloys
  • Thin-films

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