This paper presents a new basic concept which is the theory of micro field effect to analyze the actuation mechanism of MEMS(Micro Electro Mechanical Systems) actuators. First, the basic concept and fundamental principle of micro field have been put forward. Then, the micro field effect has been used to analyze the intrinsic quality of two kinds of microactuators, which include an electrohydrodynamic (EHD) micropump and a piezoelectric micromotor as typical examples. Finally, a new kind of piezoelectric micromotor model has been fabricated to carry out experiments. The basic principle of micro field effect has been tested and verified.
|Original language||English (US)|
|Number of pages||4|
|Journal||American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC|
|State||Published - Dec 1 1996|