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The application of solid source diffusion in the Vertical Replacement-Gate (VRG) MOSFET
Sang Hyun Oh, J. M. Hergenrother, Don Monroe, T. Nigam, F. P. Klemens, A. Kornblit, W. M. Mansfield, F. H. Baumann, H. J. Gossmann, C. A. King, R. N. Kleiman, H. H. Vuong, G. R. Weber, C. S. Rafferty
Research output: Contribution to journal › Article › peer-review
1
Scopus
citations