The effect of substrate temperature on the properties of nanostructured silicon carbide films deposited by hypersonic plasma particle deposition

J. Blum, N. Tymiak, A. Neuman, Z. Wong, N. P. Rao, Steven L Girshick, William W Gerberich, Peter H McMurry, J. V.R. Heberlein

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

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