TY - JOUR
T1 - Theoretical analysis of the sensing and actuating effects of piezoelectric multimorph cantilevers
AU - Liu, Mengwei
AU - Tong, Jianhua
AU - Wang, Liding
AU - Cui, Tianhong
PY - 2006/3
Y1 - 2006/3
N2 - The paper presents the modeling of two types of piezoelectric microcantilevers, the two-layer and two-segment piezoelectric cantilevers, in which the two piezoelectric parts perform sensor and actuator functions, respectively. An analytic model is proposed to evaluate the sensing and actuating effects of multiporph microcantilevers formed of several layers or segments of piezoelectric materials. The analytical model is used to analyze the tip deflection of the cantilever and the piezoelectric charge generated on the sensor element as a function of the microcantilever geometry. The cantilevers of sensing and actuation are compared for the different working situations of the two-layer and two-segment cantilevers. The theoretical results can be used to optimize the design of the piezoelectric cantilever structures.
AB - The paper presents the modeling of two types of piezoelectric microcantilevers, the two-layer and two-segment piezoelectric cantilevers, in which the two piezoelectric parts perform sensor and actuator functions, respectively. An analytic model is proposed to evaluate the sensing and actuating effects of multiporph microcantilevers formed of several layers or segments of piezoelectric materials. The analytical model is used to analyze the tip deflection of the cantilever and the piezoelectric charge generated on the sensor element as a function of the microcantilever geometry. The cantilevers of sensing and actuation are compared for the different working situations of the two-layer and two-segment cantilevers. The theoretical results can be used to optimize the design of the piezoelectric cantilever structures.
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U2 - 10.1007/s00542-005-0062-2
DO - 10.1007/s00542-005-0062-2
M3 - Article
AN - SCOPUS:33644537660
SN - 0946-7076
VL - 12
SP - 335
EP - 342
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 4
ER -