Theoretical analysis of the sensing and actuating effects of piezoelectric multimorph cantilevers

Mengwei Liu, Jianhua Tong, Liding Wang, Tianhong Cui

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

The paper presents the modeling of two types of piezoelectric microcantilevers, the two-layer and two-segment piezoelectric cantilevers, in which the two piezoelectric parts perform sensor and actuator functions, respectively. An analytic model is proposed to evaluate the sensing and actuating effects of multiporph microcantilevers formed of several layers or segments of piezoelectric materials. The analytical model is used to analyze the tip deflection of the cantilever and the piezoelectric charge generated on the sensor element as a function of the microcantilever geometry. The cantilevers of sensing and actuation are compared for the different working situations of the two-layer and two-segment cantilevers. The theoretical results can be used to optimize the design of the piezoelectric cantilever structures.

Original languageEnglish (US)
Pages (from-to)335-342
Number of pages8
JournalMicrosystem Technologies
Volume12
Issue number4
DOIs
StatePublished - Mar 1 2006

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