Ultrathin nitride layers grown by molecular-beam epitaxy and their effects on interface states in silicon metal-insulator-semiconductor field-effect transistors

R. T. Fayfield, J. Chen, M. S. Hagedorn, T. K. Higman, A. M. Moy, K. Y. Cheng

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Fingerprint

Dive into the research topics of 'Ultrathin nitride layers grown by molecular-beam epitaxy and their effects on interface states in silicon metal-insulator-semiconductor field-effect transistors'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy