Wireless LTCC-based capacitive pressure sensor for harsh environment

Jijun Xiong; Ying Li; Yingping Hong; Binzhen Zhang; Tianhong Cui; Qiulin Tan; Shijun Zheng; Ting Liang

doi:10.1016/j.sna.2013.04.007

Wireless LTCC-based capacitive pressure sensor for harsh environment

Jijun Xiong, Ying Li, Yingping Hong, Binzhen Zhang, Tianhong Cui, Qiulin Tan, Shijun Zheng, Ting Liang

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

78 Scopus citations

Abstract

This paper presents a wireless capacitive pressure sensor based on LTCC (low temperature co-fired ceramic) technology, where the design, fabrication, and measurement of the sensor is demonstrated and discussed. Differ from traditional LTCC process flow, a unique process of screen-printing sacrifice layer has been introduced to avoid deformation of the capacitive embedded cavity during lamination or sintering, which leads to a better performance of the sensor. A greater sensitivity of the sensor, comparing with its predecessors, is showed during measurement. Finally ways for future optimization are proposed.

Original language	English (US)
Pages (from-to)	30-37
Number of pages	8
Journal	Sensors and Actuators, A: Physical
Volume	197
DOIs	https://doi.org/10.1016/j.sna.2013.04.007
State	Published - 2013

Bibliographical note

Funding Information:
The research was supported by the National Basic Research Program of China (973 Program) under the Grant of No. 2010CB334703 . Additionally, the research was also supported by National Natural Science Foundation of China under Grant of No. 51075375 .

Keywords

Capacitive pressure sensor Wireless Low temperature co-fired ceramic (LTCC) Harsh environment Sacrifice paste

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title = "Wireless LTCC-based capacitive pressure sensor for harsh environment",

abstract = "This paper presents a wireless capacitive pressure sensor based on LTCC (low temperature co-fired ceramic) technology, where the design, fabrication, and measurement of the sensor is demonstrated and discussed. Differ from traditional LTCC process flow, a unique process of screen-printing sacrifice layer has been introduced to avoid deformation of the capacitive embedded cavity during lamination or sintering, which leads to a better performance of the sensor. A greater sensitivity of the sensor, comparing with its predecessors, is showed during measurement. Finally ways for future optimization are proposed.",

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AU - Xiong, Jijun

AU - Li, Ying

AU - Hong, Yingping

AU - Zhang, Binzhen

AU - Cui, Tianhong

AU - Tan, Qiulin

AU - Zheng, Shijun

AU - Liang, Ting

N1 - Funding Information: The research was supported by the National Basic Research Program of China (973 Program) under the Grant of No. 2010CB334703 . Additionally, the research was also supported by National Natural Science Foundation of China under Grant of No. 51075375 .

PY - 2013

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Wireless LTCC-based capacitive pressure sensor for harsh environment

Abstract

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