A semiconductor process for cointegration of BAW thin-film piezoelectrics with microwave BJTs

Mathematics

• Resonator 100%
• Cointegration 98%
• Microwave 94%
• Piezoelectric 92%
• Thin Films 88%
• Acoustic Waves 87%
• Semiconductors 83%
• Integrated Circuits 52%
• Monolithic Integration 37%
• Etching 28%
• Equivalent Circuit 27%
• Silicon 25%
• Capacitor 24%
• Design 22%
• Optimization 13%

Engineering & Materials Science

• Bipolar transistors 87%
• Thin films 67%
• Resonators 66%
• Semiconductor materials 62%
• Microwaves 62%
• Acoustic waves 56%
• MOS capacitors 27%
• Reactive ion etching 24%
• Scattering parameters 20%
• SPICE 19%
• Resistors 17%
• Equivalent circuits 17%
• Silicon 13%

Physics & Astronomy

• junction transistors 97%
• bipolar transistors 76%
• resonators 53%
• microwaves 47%
• application specific integrated circuits 43%
• acoustics 40%
• thin films 36%
• equivalent circuits 18%
• resistors 18%
• capacitors 15%
• Q factors 15%
• etching 13%
• oscillators 13%
• optimization 11%
• silicon 9%
• ions 8%