Amorphous mixed TiO2 and SiO2 films on Si(100) by chemical vapor deposition

R. C. Smith, C. J. Taylor, J. Roberts, N. Hoilien, S. A. Campbell, W. L. Gladfelter

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fingerprint

Dive into the research topics of 'Amorphous mixed TiO2 and SiO2 films on Si(100) by chemical vapor deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds