@inproceedings{0de168fe408e4dafaadfde0fb4d6ab63,
title = "Analysis of micromachined PZT membranes for MEMS power",
abstract = "The performance of a piezoelectric generator in terms of the quality factor Q, the electromechanical coupling coefficient k2, and the efficiency were examined. The effect of design parameters such as membrane size, piezoelectric thickness, silicon thickness, and top electrode area are explored. The results show that both k2 and Q are sensitive to PZT thickness and electrode size.",
keywords = "Efficiency, Electromechanical coupling coefficient, Mems power, Quality factor, pzt membrane",
author = "Cho, {J. H.} and Anderson, {M. J.} and Richards, {R. F.} and Bahr, {D. F.} and Richards, {C. D.}",
year = "2004",
month = nov,
day = "2",
language = "English (US)",
isbn = "0972842276",
series = "2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004",
pages = "382--385",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004",
note = "2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 ; Conference date: 07-03-2004 Through 11-03-2004",
}