Atomic layer lithography of wafer-scale nanogap arrays for extreme confinement of electromagnetic waves

Xiaoshu Chen, Hyeong Ryeol Park, Matthew Pelton, Xianji Piao, Nathan C. Lindquist, Hyungsoon Im, Yun Jung Kim, Jae Sung Ahn, Kwang Jun Ahn, Namkyoo Park, Dai Sik Kim, Sang Hyun Oh

Research output: Contribution to journalArticlepeer-review

288 Scopus citations

Fingerprint

Dive into the research topics of 'Atomic layer lithography of wafer-scale nanogap arrays for extreme confinement of electromagnetic waves'. Together they form a unique fingerprint.

Medicine & Life Sciences

Chemical Compounds

Physics & Astronomy